New in IEEE Sensors Journal: Design for Manufacturability a Holistic Approach for the Development of MEMS Inertial Sensors

New paper on improved inertial sensor manufacturing made possible through collaboration of researchers from Teledyne MEMS, University of Windsor, Stellantis and Polytec.

Makers of high accuracy inertial MEMS sensors must anticipate and accommodate for manufacturing variations during the design stage. This allows them to minimize reliance on post-fabrication mitigation measures.

This article presents a prefabrication design approach that utilizes historical manufacturing data to fit models for fabrication process simulation to predict fabricated device geometry, incorporating account for potential variations in fabrication. Leveraging analytical and finite element modeling, we recreate the manufactured device and its operating conditions to predict its performance.

 

Read the article at IEEE Xplore:

Design for Manufacturability a Holistic Approach for the Development of MEMS Inertial Sensors


G. Nagesh, Ahmad Rahbar Ranji, Sahereh Sahanbadadi, Kevin Li, Kilian Shambaugh, Ryan Graham, Mario Pineda, Tyler Harrison, Dean Spicer, M. Ahamed
Published in IEEE Sensors Journal, Issue 3, 15 January 2025

 

 

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